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Page Title: SUMMARY - Continued
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SUMMARY - Continued
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Neets Module 14-Introduction to Microelectronics
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SUMMARY - Continued

1-46 Rapid development has resulted in increased reliability and availability, reduced cost, and higher element density. LARGE-SCALE (lsi) and VERY LARGE-SCALE INTEGRATION (vlsi) allow thousands of elements in a single chip. MONOLITHIC ICs are produced by the diffusion or epitaxial methods. DIFFUSED elements penetrate the substrate, EPITAXIAL do not. ISOLATION is a production method to prevent unwanted interaction between elements within a chip. THIN-FILM ELEMENTS are produced through EVAPORATION or CATHODE SPUTTERING techniques. THICK-FILM ELEMENTS are screened onto the substrate. The most common types of packages for ICs are TO, FLAT PACK, and DUAL INLINE.

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