Thick Film

1-17 Figure 1-17.—Cathode-sputtering mask. Finely polished glass, glazed ceramic, and oxidized silicon have been used as substrate materials for thin films. A number of materials, including nichrome, a compound of silicon oxide and chromium cermets, tantalum, and titanium, have been used for thin-film resistors. Nichrome is the most widely used. The process for producing thin-film capacitors involves deposition of a bottom electrode, a dielectric, and finally a top electrode. The most commonly used dielectric materials are silicon monoxide and silicon dioxide. Thick Film Thick films are produced by screening patterns of conducting and insulating materials on ceramic substrates. A thick film is a film of material with a thickness that is at least 10 times greater than the mean free path of an electron in that material, or approximately 0.001 centimeter. The technique is used to produce only passive elements, such as resistors and capacitors. PROCEDURES.—One procedure used in fabricating a thick film is to produce a series of stencils called SCREENS. The screens are placed on the substrate and appropriate conducting or insulating materials are wiped across the screen. Once the conducting or insulating material has been applied, the screens are removed and the formulations are fired at temperatures above 600 degrees Celsius. This process forms alloys that are permanently bonded to the insulating substrate. To a limited extent, the characteristics of the film can be controlled by the firing temperature and length of firing time. RESISTORS.—Thick-film resistance values can be held to a tolerance of � 10 percent. Closer tolerances are obtained by trimming each resistor after fabrication. Hundreds of different cermet formulations are used to produce a wide range of component parameters. For example, the material used for a 10-ohm-per-square resistor is quite different from that used for a 100-kilohm-per-square resistor. CAPACITORS AND RESISTOR-CAPACITOR NETWORKS.—Capacitors are formed by a sequence of screenings and firings. Capacitors in this case consist of a bottom plate, intraconnections, a dielectric, and a top plate. For resistor-capacitor networks, the next step would be to deposit the resistor material through the screen. The final step is screening and firing of a glass enclosure to seal the unit.